Gray-scale photolithography using microfluidic photomasks

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Chen et al. (2003) Proc. Natl. Acad. Sci. USA, 10.1073/pnas.0435755100

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  1. Published online before print February 6, 2003, doi: 10.1073/pnas.0435755100 PNAS February 18, 2003 vol. 100 no. 4 1499-1504
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